Sweeping the tilt angle can boost movie thickness uniformity and sidewall coverage although also steering clear of high Strength-reflected neutral species for important processes.
IBSD can take position within a superior vacuum environment, reducing noble gas inclusion while in the deposited movie and bettering the environmental steadiness with the coating.
Concentrate on rotation and carousel indexing Every single have torque sense, avoiding any process problems as a consequence of slips or jams in rotation.
The scale, position, and equipment ratio of every World are optimized to offer the best possible achievable film thickness uniformity.
Our Reticle® ion beam sputter deposition programs are built and engineered to build exact optical movies of the highest purity, density, and steadiness.
Variable angle stages allow for pretty impressive skinny film approaches. However, one of its major problems is reproducibility. The substrate is usually set at a really oblique angle in relation for the resource, as well as the films are very sensitive towards the precision of this angle.
Angstrom went to excellent lengths to refine the tolerances of the lean angle, strengthening it from the variation of up to a full diploma on non-Angstrom units I’ve utilized to under 0.
Generally, a QCM is accustomed to calibrate an Preliminary deposition amount before completing the layer thickness below time control with a hard and fast beam present. Shuttering the crystal will dramatically extend its working lifetime during prolonged processes or on methods that has a load lock.
IBSD processes also can employ a secondary ion supply for substrate cleaning and energetic help, substrate heating for reactive deposition, As well as in-situ optical checking or ellipsometry for important layer thickness termination.
All regular Reticle® platforms include an additional gridless close-Hall ion resource with hollow cathode neutralizer.
The deposition ion source is directed toward a material goal which has been optimized in each measurement and posture for the necessary deposition geometry.
Self-aligned ion optics are configured specifically for the desired deposition demands and geometry of the approach.
Angstrom Engineering’s Reticle® techniques give a turn-important Alternative for all those aiming to comprehend any optical style into a significant-general performance movie.
Dynamic uniformity shaping is attained employing a flux correction shield amongst the deposition source plus the substrate.
Each individual axis of movement is managed by means of Aeres® working with precision servo motors, supplying much better than 0.1 degrees of positional precision. Entrance aspect infrared heating bulbs tilt with the High-purity metal products stage to deliver a steady temperature profile for reactive processes.